JPS63200345U - - Google Patents
Info
- Publication number
- JPS63200345U JPS63200345U JP9005087U JP9005087U JPS63200345U JP S63200345 U JPS63200345 U JP S63200345U JP 9005087 U JP9005087 U JP 9005087U JP 9005087 U JP9005087 U JP 9005087U JP S63200345 U JPS63200345 U JP S63200345U
- Authority
- JP
- Japan
- Prior art keywords
- wafer carrier
- identification information
- recognition device
- opening
- size
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims 8
- 239000004065 semiconductor Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9005087U JPS63200345U (en]) | 1987-06-11 | 1987-06-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9005087U JPS63200345U (en]) | 1987-06-11 | 1987-06-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63200345U true JPS63200345U (en]) | 1988-12-23 |
Family
ID=30949576
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9005087U Pending JPS63200345U (en]) | 1987-06-11 | 1987-06-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63200345U (en]) |
-
1987
- 1987-06-11 JP JP9005087U patent/JPS63200345U/ja active Pending